Probe Station

These actions allow to control a prober.

Change wafer action logo Change Wafer [Executed Once]

Punctual action to load a new Wafer during sweep plan sequence.

Change wafer action

  • Hardware: select the prober
  • Wafer to load: choose the wafer to load
    • First: load the first wafer
    • Last: load the last wafer
    • Next: load the next wafer (if the last wafer is already loaded, an error occurs)
    • Previous: load the previous wafer (if the first wafer is loaded, an error occurs)

Wafer plan action logo Wafer plan [Loop]

Program a loop on all wafers.

Wafer plan action

  • Hardware: select the prober
  • Move direction: choose the loop direction
    • Begin to end: starting with the first and finishing with the last wafer
    • End to begin: starting with the last and finishing with the first wafer

Move probe action logo Move probe [Executed Once]

Punctual action to move the probe to a particular position.

Move probe action

  • Hardware: select the prober
  • Move:
    • Follow probe plan:
      • Move: direction following the plan
      • Move constraint:
        • None: move to next sub-dies; if not available move to next die
        • Skip sub-dies: move to next die (on the first sub-die)
        • Stay in die: move to next sub-die (if the probe is already on the last sub-die, an error occurs)
    • Custom move: choose a custom position on wafer
      • X: coordinate X of the position
      • Y: coordinate Y of the position
      • Sub-die: index of the sub-die (starting at 0)

Probe plan action logo Probe plan [Loop]

Program a loop on wafer positions.

Probe plan action

  • Hardware: select the prober
  • Loop:
    • Follow probe plan:
      • Move direction:choose the loop direction
        • Begin to end: starting with the first and finishing with the last probe
        • End to begin: starting with the last and finishing with the first probe
      • Move constraint:
        • None: move to next sub-dies; if not available move to next die
        • Skip sub-dies: move to next die (go on the first sub-die of the next die)
        • Stay in die: move to next sub-die
    • Custom sweep: list of positions that will be measured